In this tutorial, we will learn about an interesting technology called MEMS. We will see some basic concepts of MEMs and also take a look at the applications of MEMS in the form of MEMS Sensors. We will also learn about different types of MEMS Sensors and some of the current applications.
What is MEMS
MEMS is short for Micro Electro Mechanical Systems. It is a technology associated with manufacturing of microscale devices like Sensors, Transducers, Actuators, Gears, Pumps, Switches etc.In other words, MEMS are microscopic integrated devices that are a combination of electronics, electrical and mechanical elements, all working together for a single functional requirement using a technology called Microsystems Technology (MST).The MEMS technology is considered to be an extended form of traditional integrated circuit (IC) manufacturing. The main difference between the traditional IC Manufacturing technology (VLSI) and MEMS is that using MEMS you can not only fabricate electrical components like Capacitors and Inductors but also mechanical components like gears, springs, beams etc. Using traditional IC Technology, you can only fabricate conductors, insulators, diodes and transistors.
Applications:
MEMS Sensors are already being used in a variety of applications like controlling and handling equipment, managing robots, cars, grippers, etc. You can find these sensors in modern ink jet printers, Colour Projectors, Display Systems, Clocks and Scanning equipment.MEMS Technology is used to manufacture different sensors like Pressure, Temperature, Vibration and Chemical Sensors.Accelerometers, Gyroscopes, e-Compass etc. are some of the commonly used MEMS Sensors in cars, helicopters, aircrafts, drones and ships.
6th Edition of International Conference on Sensing Technology | 23-24 June 2023 | San Francisco, US
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